Plasma Processing of Materials: Scientific Opportunities and Technological Challenges
Full Title: | Plasma Processing of Materials: Scientific Opportunities and Technological Challenges |
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ISBN: | 0309045975 |
ISBN13: | 9780309045971 |
Authors: |
National Research Council Division on Engineering and Physical Sciences Commission on Physical Sciences, Mathematics, and Applications Board on Physics and Astronomy Plasma Science Committee Panel on Plasma Processing of Materials |