This is the alphabetically ordered list of books of this author on
'Microlithography -- Congresses' subject
(click to see subject information and books of other authors).
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 15-16 November 1999, Munich, Germany Uwe F. W. Behringer, chair/editor; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany); cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany)
Publisher: Bellingham, Washington : SPIE, c2000.
ISBN: 0819436143
17th European Conference on Mask Technology for Integrated Circuits and Microcomponents
17th European Conference on Mask Technology for Integrated Circuits and Microcomponents: proceedings: 13-14 November 2000, Munich, Germany Uwe F. W. Behringer, chair/editor; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany); published by SPIE--the International Society for Optical Engineering
Publisher: Bellingham, Washington : SPIE, c2001.
ISBN: 0819440396
20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
20th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 12-14 January 2004, Dresden, Germany Uwe F. W. Behringer, chair/editor; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany); cooperating organizations, SEMI Europe... [et al.]
Publisher: Bellingham, Washington : SPIE, c2004.
ISBN: 0819454370
EMLC 2008
EMLC 2008 24th European Mask and Lithography Conference: 21-24 January 2008, Dresden, Germany Uwe F. W. Behringer, chair/editor; Wilhelm Maurer, Jacques Waelpoel, program chairs; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany); cooperating organizations, BACUS... [et al.]
Publisher: Bellingham, Wash., : SPIE, c2008.
ISBN: 0819469564
LCC: TK7872
