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17th European Conference on Mask Technology for Integrated Circuits and Microcomponents
17th European Conference on Mask Technology for Integrated Circuits and Microcomponents: proceedings: 13-14 November 2000, Munich, Germany
Uwe F. W. Behringer, chair/editor; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany); published by SPIE--the International Society for Optical Engineering
Publisher: Bellingham, Washington : SPIE, c2001.
ISBN: 0819440396  

Notes:

Includes bibliographical references and index.

Book Details:

Language: eng
Physical Description: x, 192 p. : ill. ; 28 cm.

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Libraries this book has an entry in:

•  Emory University (last modified on 07/26/2004)
•  Yale University Library (last modified on 07/18/2004)
•  Texas A & M University Database (last modified on 11/01/2003)

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