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16th European Conference on Mask Technology for Integrated Circuits and Microcomponents
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 15-16 November 1999, Munich, Germany
Uwe F. W. Behringer, chair/editor; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany); cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany)
Publisher: Bellingham, Washington : SPIE, c2000.
ISBN: 0819436143  

Notes:

At head of title: Proceedings.

Includes bibliographical references and index.

Book Details:

Language: eng
Physical Description: xii, 252 p. : ill. ; 28 cm.

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Libraries this book has an entry in:

•  OhioLINK Central Database (last modified on 01/20/2009)
•  Canada Institute for Scientific and Technical Information (CISTI) (last modified on 08/20/2008)
•  Cornell University (last modified on 07/21/2008)
•  LIBRIS -- Swedish Union Catalog (last modified on 10/04/2007)
•  University of Alabama, Birmingham (last modified on 11/01/2006)
•  Texas A & M University Database (last modified on 12/01/2004)
•  University of Hong Kong (last modified on 11/01/2003)

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